@inproceedings{CTT100629793,
  author = {Bin Huang and Bin Xie and Fei Jiang and Taku Tomizuka and Yasuhiro Takimoto and Masato Watanabe and Feng Xiao and Eiki Hotta},
  title = {Numerical study of the initial gas distribution on a gas jet plasma EUV source},
  booktitle = {Proceedings of 2011 Annual Conference of Fundamentals and Materials Society IEE Japan},
  year = 2011,
}

@inproceedings{CTT100618698,
  author = {Osamu Sakuchi and Fei Jiang and Junzaburo Yamada and Qiushi Zhu and Masato Watanabe and Tohru Kawamura and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta},
  title = {Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography},
  booktitle = {ICPP2008 Abstracts},
  year = 2008,
}

@inproceedings{CTT100618699,
  author = {Masato Watanabe and Nozomu Kishi and Junzaburo Yamada and Osamu Sakuchi and Jiang Fei and Zhu Qiushi and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta},
  title = {Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source},
  booktitle = {IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science},
  year = 2008,
}

@inproceedings{CTT100549107,
  author = {Sakuchi Osamu and Iizuka Naoya and Jiang Fei and Watanabe Masato and Kawamura Tohru and Okino Akitoshi and Horioka Kazuhiko and Hotta Eiki},
  title = {Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100544716,
  author = {MASATO WATANABE and Nozomu Kishi and Naoya Iizuka and Shinya Orishimo and Fei Jiang and AKITOSHI OKINO and EIKI HOTTA},
  title = {Optical Observation of Gas Jet Z-Pinch Discharge Produced Extreme Ultraviolet Light Source},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100556217,
  author = {Masato Watanabe and Nozomu Kishi and Jiang Fei and Akitoshi Okino and Bong-Seong Kim and Kwang-Cheol Ko and Kazuhiko Horioka and Eiki Hotta},
  title = {Development of Xe and Sn Discharge Produced Plasma Light Source for EUV Lithography},
  booktitle = {},
  year = 2007,
}