@inproceedings{CTT100939013, author = {He Wentao and Tetsuji Kiyota and Kenta Doi and Yuya Yamashita and Wataru Kikuchi and Shuhei Watanabe and Ayaki Sakurai and Yuchen Ye and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis}, booktitle = {Bull. American Phys. Soc.}, year = 2025, } @inproceedings{CTT100939034, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Wataru Kikuchi and Kazuki Shimatani and Hinata Hanyu and Wentao He and Ayaki Sakurai and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects}, booktitle = {Bull. American Phys. Soc.}, year = 2025, } @inproceedings{CTT100939033, author = {Kazuki Shimatani and Tetsuji Kiyota and Kenta Doi and Yuya Yamashita and Wataru Kikuchi and Kenta Ishi and Yuchen Ye and Ayaki Sakurai and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution measurement of electron temperature and density of inductively coupled nitrogen plasma by tomographic optical emission spectroscopy}, booktitle = {Bull. American Phys. Soc.}, year = 2025, } @inproceedings{CTT100929943, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Kazuki Shimatani and Ayaki Sakurai and Wentao He and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Exploring Multiple Solutions of Electron Temperature and Density in the Argon Collisional-Radiative Model Using Monte Carlo Simulations}, booktitle = {Proceedings of ISPlasma2025/IC-PLANTS2025}, year = 2025, } @inproceedings{CTT100930432, author = {櫻井 彩貴 and 山下 雄也 and YE YUCHEN and 島谷 和希 and 福本 晃己 and 根津 篤 and 赤塚 洋}, title = {ICP放電窒素プラズマへのアルゴン混入による非平衡性の変化}, booktitle = {令和 7 年電気学会全国大会 講演論文集}, year = 2025, } @inproceedings{CTT100927998, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 叶 宇晨 and 菊地 航行 and 島谷 和希 and 何 文涛 and 羽生 陽向 and 櫻井 彩貴 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測とAr衝突輻射モデルにもとづくCF4/O2/Arプラズマの診断--他原子種の励起状態分布が診断結果に及ぼす影響}, booktitle = {「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」要旨集}, year = 2024, } @inproceedings{CTT100927962, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Detection of Two-Temperature Distributions of Argon ICP Using Collisional-Radiative Model and Tomographic Optical Emission Spectroscopy}, booktitle = {「プラズマの分光診断と原子分子素過程の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会(2024/12)要旨集}, year = 2024, } @inproceedings{CTT100925568, author = {山下 雄也 and 土居 謙太 and 清田哲司 and 叶宇晨 and 島谷和希 and 何文涛 and 羽生陽向 and 菊地航行 and 櫻井彩貴 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断}, booktitle = {第85回応用物理学会秋季学術講演会 講演要旨集}, year = 2024, } @inproceedings{CTT100927260, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements}, booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF}, year = 2024, }