@article{CTT100910937,
  author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers  },
  journal = {Micro and Nano Engineering},
  year = 2024,
}

@article{CTT100909951,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers},
  journal = {Micro and Nano Engineering},
  year = 2024,
}

@article{CTT100909052,
  author = {Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki ;  Ito and Yoshihiro Miyake and Masato Sone},
  title = {Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications},
  journal = {Journal of The Electrochemical Society},
  year = 2024,
}

@article{CTT100908961,
  author = {Kisuke Miyado and Devi Srujana  Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}

@article{CTT100887972,
  author = {Akira Onishi and Kisuke Miyado and Devi Srujana Tenneti and Katsuyuki Machida and Parthojit Chakraborty and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology},
  journal = {2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)},
  year = 2023,
}

@article{CTT100875654,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Katsuyuki Machida and Parthojit Chakraborty and Shin-ichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure},
  journal = {IEEE Sensors Journal},
  year = 2022,
}

@article{CTT100866853,
  author = {Akira Onishi and Kohei Shibata and Akihiro Uchiyama and Katsuyuki  Machida and Taiki  Ogata and Noboru  Ishihara and Hirotaka Uchitomi and Tso-Fu Mark  Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki  Ito},
  title = {Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement},
  journal = {Japanese Journal of Applied Physics},
  year = 2022,
}

@inproceedings{CTT100906278,
  author = {御宿 希祐 and 大西 哲 Tenneti Devi Srujana 町田克之 and TENNETI DEVI and 町田 克之 and 栗岡 智行 and Tso-Fu Mark Chang and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討},
  booktitle = {第15回集積化MEMSシンポジウム論文集},
  year = 2023,
}

@inproceedings{CTT100895772,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki  Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100895776,
  author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100903468,
  author = {御宿 希祐Kisuke Miyado and Devi.Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer},
  booktitle = {Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02},
  year = 2023,
}

@inproceedings{CTT100903469,
  author = {御宿 希祐 and 大西 哲 and Devi Srujana Tenneti and 町田 克之 and 栗岡智行 and CHAKRABORTYP and Tso-Fu Mark Chang and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討},
  booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集},
  year = 2023,
}

@inproceedings{CTT100885244,
  author = {渡邉 春海 and Chen Chun-Yi and 栗岡 智行 and Chang Tso-Fu Mark and 大西 哲 and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100903096,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and 町田克之 and CHAKRABORTYP and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885240,
  author = {宮井 良介 and 栗岡 智行 and Chun-Yi Chen and Tso-Fu Mark Chang and 大西 哲 and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100903097,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討},
  booktitle = {第83回応用物理学会秋季学術講演会},
  year = 2022,
}

@inproceedings{CTT100873968,
  author = {Taro Omura and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Warpage Characteristics of Gold Proof Mass  in MEMS Capacitive Accelerometer},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100903102,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100873383,
  author = {柴田滉平 and 内山晃宏 and 大西哲 and 李尚曄 and 町田克之 and 石原昇 and 益一哉 and 伊藤浩之},
  title = {Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873385,
  author = {内山晃宏 and 柴田滉平 and 大西哲 and 市川崇志 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジAu錘1軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873384,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873379,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873378,
  author = {柴田滉平 and 内山晃宏 and 大西哲 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}