@inproceedings{CTT100628090, author = {Y. Takimoto and Huang Bin and O. Sakuchi and M. Watanabe and E. Hotta}, title = {Study of a Gas Jet Type Z-pinch EUV Light Source}, booktitle = {Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology}, year = 2011, } @inproceedings{CTT100618698, author = {Osamu Sakuchi and Fei Jiang and Junzaburo Yamada and Qiushi Zhu and Masato Watanabe and Tohru Kawamura and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography}, booktitle = {ICPP2008 Abstracts}, year = 2008, } @inproceedings{CTT100618699, author = {Masato Watanabe and Nozomu Kishi and Junzaburo Yamada and Osamu Sakuchi and Jiang Fei and Zhu Qiushi and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source}, booktitle = {IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science}, year = 2008, } @inproceedings{CTT100549107, author = {Sakuchi Osamu and Iizuka Naoya and Jiang Fei and Watanabe Masato and Kawamura Tohru and Okino Akitoshi and Horioka Kazuhiko and Hotta Eiki}, title = {Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography}, booktitle = {}, year = 2008, } @misc{CTT100591010, author = {堀田栄喜 and 渡邊正人 and 酒井雄祐 and 富安邦彦 and 清水政志 and 作地修 and 高橋俊輔 and 山田淳三郎 and 朱秋石 and 横山快 and 加藤大輔}, title = {放電型ビーム核融合中性子源}, year = 2009, }