@article{CTT100632452, author = {Qiushi Zhu and Takahiro Muto and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method}, journal = {J. Appl. Phys.}, year = 2011, } @article{CTT100619497, author = {Q Zhu and J Yamada and N Kishi and M Watanabe and A Okino and K Horioka and E Hotta}, title = {Investigation of the dynamics of the Z-pinch imploding plasma for a laser-assisted discharge-produced Sn plasma EUV source}, journal = {J. Phys. D: Appl. Phys.}, year = 2011, } @article{CTT100605327, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum}, journal = {Jpn. J. Appl. Phys.}, year = 2010, } @article{CTT100591013, author = {Junzaburo Yamada and Zhu Qiushi and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Tohru Kawamura and Kazuhiko Horioka and Eiki Hotta}, title = {Development of laser triggered tin discharge EUV light source}, journal = {Pulsed Power Technology and Its Application to Plasma Science}, year = 2009, } @inproceedings{CTT100645586, author = {T. Muto and Q. Zhu and J. Yamada and N. Kishi and M. Watanabe and E. Hotta}, title = {Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method}, booktitle = {}, year = 2012, } @inproceedings{CTT100632355, author = {Zhu Qiushi and Takahiro Muto and Junzaburo Yamada and Nozomu Kishi and Masato watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Estimation of electron temperature and density of the decay plasma in a LADPP EUV source}, booktitle = {The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology}, year = 2011, } @inproceedings{CTT100632346, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source}, booktitle = {2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)}, year = 2011, } @inproceedings{CTT100615390, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source}, booktitle = {Web}, year = 2010, } @inproceedings{CTT100618694, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum}, booktitle = {}, year = 2009, } @inproceedings{CTT100572386, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and MASATO WATANABE and AKITOSHI OKINO and EIKI HOTTA}, title = {Plasma Behavior of Laser Assisted Sn Discharge EUV Source}, booktitle = {平成21年電気学会全国大会}, year = 2009, } @inproceedings{CTT100618697, author = {Eiki Hotta and Nozomu Kishi and Junzaburo Yamada and Qiushi Zhu and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino}, title = {Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source}, booktitle = {}, year = 2008, } @inproceedings{CTT100618698, author = {Osamu Sakuchi and Fei Jiang and Junzaburo Yamada and Qiushi Zhu and Masato Watanabe and Tohru Kawamura and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography}, booktitle = {ICPP2008 Abstracts}, year = 2008, } @inproceedings{CTT100566019, author = {Masato Watanabe and Junzaburo Yamada and Qiushi Zhu and Eiki Hotta}, title = {Development of Extreme Ultraviolet Radiation Source using Laser Triggered Vacuum Spark Discharge Plasma}, booktitle = {}, year = 2008, } @inproceedings{CTT100618695, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Eiki Hotta}, title = {Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source}, booktitle = {}, year = 2008, } @inproceedings{CTT100618696, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Eiki Hotta}, title = {EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma}, booktitle = {}, year = 2008, } @inproceedings{CTT100618699, author = {Masato Watanabe and Nozomu Kishi and Junzaburo Yamada and Osamu Sakuchi and Jiang Fei and Zhu Qiushi and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source}, booktitle = {IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science}, year = 2008, } @inproceedings{CTT100618700, author = {山田 淳三郎 and ズ キュシ and 岸 望 and 渡邊 正人 and MASNAVI MAJID and 沖野 晃俊 and 河村 徹 and 堀岡 一彦 and 堀田 栄喜}, title = {レーザトリガ型Sn EUV放電光源の開発}, booktitle = {電気学会パルスパワー・放電合同研究会資料}, year = 2008, } @inproceedings{CTT100552076, author = {渡邊正人 and 岸望 and 山田淳三郎 and 堀田栄喜}, title = {レーザトリガ型EUV放電光源の開発}, booktitle = {平成20年電気学会全国大会講演論文集}, year = 2008, } @inproceedings{CTT100546563, author = {山田淳三郎 and 岸望 and 渡邊正人 and 沖野晃俊 and 河村徹 and 堀岡一彦 and 堀田栄喜}, title = {レーザーアシストを用いたEUV光源の開発}, booktitle = {電気学会研究会資料}, year = 2007, } @misc{CTT100591010, author = {堀田栄喜 and 渡邊正人 and 酒井雄祐 and 富安邦彦 and 清水政志 and 作地修 and 高橋俊輔 and 山田淳三郎 and 朱秋石 and 横山快 and 加藤大輔}, title = {放電型ビーム核融合中性子源}, year = 2009, }