@article{CTT100685383,
  author = {T. Harumoto and T. Sannomiya and Y. Matsukawa and S. Muraishi and Ji Shi and Y. Nakamura and H. Sawada and T. Tanaka and Y. Tanishiro and K. Takayanagi},
  title = {Controlled polarity of sputter-deposited aluminum nitride on metals observed by aberration corrected scanning transmission electron microscopy},
  journal = {J. Appl. Phys.},
  year = 2013,
}