@inproceedings{CTT100592806, author = {Kazutoshi Okutsu and Takehiko Yamaguchi and Kaiji Sato}, title = {Fabrication Process Improvement of Optical MEMS Switch Using a Belt-shaped Thin Film Mirror}, booktitle = {Proceedings of 3rd International Conference of Asian Symposium for Precision Engineering and Nanotechnology}, year = 2009, } @inproceedings{CTT100570701, author = {山口 岳彦 and 奥津 和俊 and 佐藤 海二}, title = {帯状薄膜ミラーを利用したMEMS光スイッチの製作・組立法}, booktitle = {2008年度精密工学会春季大会学術講演会講演論文集}, year = 2008, }