@inproceedings{CTT100600807, author = {高井渉 and 根津篤 and 松浦治明 and 赤塚洋}, title = {マイクロ波放電酸素プラズマの解離度に対する希ガス混入効果のアクチノメトリー測定}, booktitle = {平成22年電気学会全国大会講演論文集}, year = 2010, } @inproceedings{CTT100599986, author = {Wataru Takai and Atsushi Nezu and Haruaki Matsuura and Hiroshi Akatsuka}, title = {Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge}, booktitle = {Proceedings 27th Symposium on Plasma Processing}, year = 2010, } @inproceedings{CTT100593765, author = {Wataru Takai and Atsushi Nezu and Haruaki Matsuura and Hiroshi Akatsuka}, title = {Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge}, booktitle = {Proc. The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology}, year = 2009, } @inproceedings{CTT100588672, author = {高井渉 and 根津篤 and 松浦治明 and 赤塚洋}, title = {マイクロ波励起による希ガス混入酸素プラズマの特性解析}, booktitle = {電気学会研究会資料 プラズマ・パルスパワー・放電合同研究会}, year = 2009, }