@inproceedings{CTT100922774, author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment}, booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part}, year = 2024, } @inproceedings{CTT100917496, author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100908972, author = {森 達彦 and 栗岡 智行 and Chen Chun-Yi and Chang Tso-Fu Mark and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人}, title = {Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, }