@article{CTT100939001,
  author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi  Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Miyake and Masato Sone},
  title = {Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-layered Structure toward MEMS Capacitive Accelerometers},
  journal = {Journal of The Electrochemical Society},
  year = 2025,
}

@inproceedings{CTT100938149,
  author = {Masako Okumura and Tomoyuki Kurioka and Torauto Yamada and Tatsuhiko Mori and Tso-Fu Mark Chang and Yoshihiro Miyake and Hiroyuki Ito and Masato Sone and Katsuyuki Machida},
  title = {Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100938150,
  author = {奥村 雅子 and 栗岡 智行 and 森 達彦 and 山田 虎人 and 向出 隼人 and Chun Yi-Chen and Tso-Fu Mark Chang and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100938151,
  author = {森 達彦 and 栗岡 智行 and 渡邉 春海 and Chun-Yi Chen and Tso-Fu Mark Chang and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {静電容量型MEMS加速度センサに向けたTi/Au積層マイクロカンチレバーの実効ヤング率に対するアニーリングの影響評価},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100934013,
  author = {Tatsuhiko Mori and Tomoyuki Kurioka and Shunkai Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {MNE2025 Southampton},
  year = 2025,
}

@inproceedings{CTT100922774,
  author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures  caused by Thermal Treatment},
  booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100917496,
  author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure  Toward High-sensitive Accelerometers},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100908972,
  author = {森 達彦 and 栗岡 智行 and Chen Chun-Yi and Chang Tso-Fu Mark and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価},
  booktitle = {Proc. The 71st JSAP Spring MeetinProc.},
  year = 2024,
}