@article{CTT100760631, author = {吾妻 範栄 and 田中 駿也 and 藤原 良元 and 進士 忠彦 and 鈴木 健一}, title = {微小多極着磁磁石を用いた2自由度マイクロ電磁アクチュエータの試作}, journal = {精密工学会誌}, year = 2018, } @article{CTT100741470, author = {A.Yamashita and K.Hirotaki and A.Kurosaki and T.yanai and H.Fukunaga and R.Fujiwara and T.Shinshi and M.Nakano}, title = {PLD-Fabricated Isotropic Pr-Fe-B Film Magnets Deposited on Glass Substrates}, journal = {IEEE Transaction on Magnetics}, year = 2017, } @article{CTT100737641, author = {中野 正基 and 山下 昂洋 and 柳井 武志 and 板倉 賢 and 藤原 良元 and 進士 忠彦 and 福永 博俊}, title = {レーザ蒸着法による硬磁性膜の作成}, journal = {まぐね/Magnetics Jpn.}, year = 2017, } @article{CTT100726948, author = {Ryogen Fujiwara and Shunya Tanaka and Wataru Hijikata and Tadahiko Shinshi and Keishi Hirotaki and Akihiro Yamashita and Masaki Nakano}, title = {Micromachining and micro-magnetization of Pr-Fe-B magnets fabricated using pulsed laser deposition for MEMS applications}, journal = {Sensors and Actuators A:Physical}, year = 2016, } @article{CTT100702074, author = {Ryogen Fujiwara and Shunya Tanaka and Wataru Hijikata and Tadahiko Shinshi}, title = {Sub-Millimeter Pitch Multipole Magnetization in a Sintered Nd-Fe-B Magnet Utilizing Laser Heating}, journal = {IEEE MAGNETICS LETTERS}, year = 2016, } @article{CTT100693071, author = {M.Nakano and Y.Chikuba, M and Oryoshi and A.yamashita and T.Yanai and R.Fujiwara and T.Shinshi and H.Fukunaga}, title = {Nd-Fe-B film magnets with the thickness above 100μm deposited on Si substrates}, journal = {IEEE Transactions on Magnetics}, year = 2015, } @article{CTT100678297, author = {Ryogen Fujiwara and Tadahiko Shinshi and Elito Kazawa}, title = {Micromagnetization pattering of sputtered NdFeB/Ta multilayered films utilizinglaster assisted heating}, journal = {Sensors and Actuators A: Physical}, year = 2014, } @article{CTT100659269, author = {藤原 良元 and 石橋 正登 and 進士 忠彦 and 上原 稔 and 堀 充孝 and 藤原 閲夫}, title = {薄膜ネオジム磁石の交番着磁とそれを用いたMEMSリニアモータの試作}, journal = {}, year = 2013, } @article{CTT100648887, author = {Ryogen Fujiwara and Tadahiko Shinshi and Minoru Uehara}, title = {Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating}, journal = {International Journal of Automation Technology}, year = 2013, } @inproceedings{CTT100755235, author = {吾妻 範栄 and 田中 駿也 and 藤原 良元 and 進士 忠彦 and 清水 大 and 近藤 秀俊 and 山口 雄太 and 山下 昂洋 and 柳井 武志 and 福永 博俊 and 中野 正基}, title = {酸化シリコン膜上にPDLで堆積された厚膜永久磁石のレーザ局所加熱による微細着磁}, booktitle = {日本機械学会第8回マイクロ・ナノ工学シンポジウム講演論文集}, year = 2017, } @inproceedings{CTT100755044, author = {Noriei AZUMA and Shunya TANAKA and Ryogen FUJIWARA and Tadahiko SHINSHI and Kenichi Suzuki}, title = {A Two-DOF MEMS Actuator Utilizing a Multi-pole Magnetized Permanent Magnet}, booktitle = {Abstruct of 21th International Conference on Mechatronics Technology}, year = 2017, } @inproceedings{CTT100742390, author = {吾妻 範栄 and 田中 駿也 and 藤原 良元 and 進士 忠彦 and 鈴木 健一 and 門田 祥悟}, title = {市松模様微細着磁磁石を用いた2自由度マイクロ電磁アクチュエータ}, booktitle = {第29回「電磁力関連のダイナミクス」シンポジウム講演論文集}, year = 2017, } @inproceedings{CTT100737639, author = {田中 駿也 and 吾妻 範栄 and 藤原 良元 and 進士 忠彦 and 鈴木 健一 and 門田 祥悟}, title = {多極微小磁石を用いた2自由度マイクロアクチュエータ}, booktitle = {2017年度精密工学会春季大会学術講演会 講演論文集}, year = 2017, } @inproceedings{CTT100734664, author = {田中 駿也 and 藤原 良元 and 進士 忠彦 and 鈴木 健一 and 門田 祥悟}, title = {サマコバ磁石を用いたネオジム磁石基板の微細多極着磁}, booktitle = {第25回MAGDAコンファレンスin 桐生 講演論文集}, year = 2016, } @inproceedings{CTT100711133, author = {清水 大 and 竹馬 雄 and 山下 昂洋 and 柳井 武志 and 中野 正基 and 福永 博俊 and 藤原 良元 and 進士 忠彦}, title = {Si基板上へのNd-Fe-B系厚膜磁石の成膜と微細加工}, booktitle = {マグネティックス研究会論文集}, year = 2016, } @inproceedings{CTT100705314, author = {藤原 良元 and 田中 駿也 and 土方 亘 and 進士 忠彦 and 鈴木 健一 and 門田 祥悟}, title = {MEMS応用を目指した焼結ネオジム磁石の薄形化}, booktitle = {第28回「電磁力関連のダイナミクス」シンポジウム講演論文集}, year = 2016, } @inproceedings{CTT100705315, author = {田中 駿也 and 藤原 良元 and 土方 亘 and 進士 忠彦 and 廣瀧 敬士 and 山下 昂洋 and 柳井 武志 and 中野 正基 and 福永 博俊 and 鈴木 健一 and 門田 祥悟}, title = {MEMS応用を目指したPLD磁石膜の微細形状加工および微細着磁}, booktitle = {第28回「電磁力関連のダイナミクス」シンポジウム講演論文集}, year = 2016, } @inproceedings{CTT100700926, author = {Ryogen Fujiwara and Wataru Hijikata and Tadahiko Shinshi}, title = {MICROMETER SCALE MAGNETIZATION OF NEODYMIUM MAGNET FOR INTERGRATED MAGNETIC MEMS}, booktitle = {Abstract of MEMS2016}, year = 2016, } @inproceedings{CTT100702969, author = {廣瀧 敬士 and 柳井 武志 and 中野 正基 and 福永 博俊 and 藤原 良元 and 進士 忠彦}, title = {PLD法を用いガラス基板上に作製したPr-Fe-B系磁石膜の磁気特性}, booktitle = {平成28年 電気学会全国大会}, year = 2016, } @inproceedings{CTT100699240, author = {Ryogen FUJIWARA and Wataru HIJIKATA and Tadahiko SHINSHI}, title = {Micro-pitch and Multi-pole Magnetization of Sintered Bulk Nd-Fe-B Magnet for MEMS Devices}, booktitle = {Abstruct of The 19th International Conference on Mechatronics Technology}, year = 2015, } @inproceedings{CTT100698669, author = {藤原 良元 and 土方 亘 and 進士 忠彦}, title = {MEMS応用を目指した焼結ネオジム磁石の微細加工}, booktitle = {日本機械学会第7回マイクロ・ナノ工学シンポジウム講演論文集}, year = 2015, } @inproceedings{CTT100695417, author = {竹馬雄 and 山下昂洋 and 柳井武志 and 中野正基 and 福永博俊 and 藤原良元 and 進士忠彦}, title = {Si基板上に成膜したNd-Fe-B系磁石膜の厚膜化と諸特性}, booktitle = {マグネティックス研究会会報MAG-15-082}, year = 2015, } @inproceedings{CTT100690383, author = {神谷 龍彦 and 藤原 良元 and 土方 亘 and 進士 忠彦 and 押領司 学 and 山下 昂洋 and 中野 正基}, title = {PLDネオジム磁石膜のMEMS応用を目指した特性評価}, booktitle = {第27回「電磁力関連のダイナミクス」シンポジウム講演論文集}, year = 2015, } @inproceedings{CTT100681275, author = {Ryogen Fujiwara and Chao Zhi and Tadahiko Shinshi and Elito Kazawa}, title = {Processing Technology of high Performance Thick Nd-Fe-B Film for Electromagnetic Energy Harvesters}, booktitle = {}, year = 2014, } @inproceedings{CTT100667920, author = {藤原 良元 and 進士 忠彦 and 加沢 エリト and 上原 稔}, title = {スパッタネオジム磁石膜のレーザアシスト微細着磁}, booktitle = {平成26年電気学会全国大会講演論文集}, year = 2014, } @inproceedings{CTT100664438, author = {藤原 良元 and 進士 忠彦 and 上原 稔}, title = {薄膜ネオジム磁石のレーザアシスト微細着磁}, booktitle = {日本機械学会第5回マイクロ・ナノ工学シンポジウム講演論文集}, year = 2013, } @inproceedings{CTT100664447, author = {Ryogen Fujiwara and Tadahiko Shinshi and Minoru Uehara and Elito Kazawa}, title = {Micro Mgnetic Patterning of Thin Film Neodymium Magnet for MEMS Devices}, booktitle = {Proceeding of the 5th international Conference of Asian Society for Precision Engineering and Nanotechnology}, year = 2013, } @inproceedings{CTT100644835, author = {Ryogen Fujiwara and Tadahiko Shinshi and Minoru Uehara and Michitaka Hori and Etsuo Fujiwara}, title = {Positioning of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet}, booktitle = {Proceeding of 16TH International Conference on Mechatronics Technology}, year = 2012, } @inproceedings{CTT100644036, author = {藤原 良元 and 進士 忠彦 and 上原 稔 and 堀 充孝 藤原 閲夫}, title = {薄膜ネオジム磁石を用いたマイクロリニアモータ}, booktitle = {2012年度精密工学会秋季大会学術講演会講演論文集}, year = 2012, } @inproceedings{CTT100635226, author = {藤原 良元 and 進士 忠彦 and 上原 稔}, title = {薄膜永久磁石を用いたMEMSリニアモータの試作研究}, booktitle = {第51回学生員卒業研究発表講演会 講演前刷集}, year = 2012, } @misc{CTT100708228, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, year = 2016, } @misc{CTT100735575, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, year = 2016, } @misc{CTT100708229, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, year = 2016, } @misc{CTT100708227, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, year = 2016, } @misc{CTT100808509, author = {進士忠彦 and 藤原良元 and 鈴木 健一}, title = {アクチュエータ}, howpublished = {登録特許}, year = 2020, month = {}, note = {特願2017-562868(2017/01/19), 再表2017/126577(2019/05/09), 特許第6749346号(2020/08/13)} } @phdthesis{CTT100708228, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, school = {東京工業大学}, year = 2016, } @phdthesis{CTT100735575, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, school = {東京工業大学}, year = 2016, } @phdthesis{CTT100708229, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, school = {東京工業大学}, year = 2016, } @phdthesis{CTT100708227, author = {藤原良元}, title = {MEMS応用を目指した永久磁石の微細加工と微細着磁}, school = {東京工業大学}, year = 2016, }