@inproceedings{CTT100898124, author = {Tetsuro Obu and Seiichiro Hara and Nobuyuki Takahashi}, title = {Measurement of areal surface topography using confocal laser microscope with tilted focal plane}, booktitle = {ICPE 2022 Proceedings}, year = 2022, } @inproceedings{CTT100858465, author = {Nobuyuki TAKAHASHI and Seiichiro HARA}, title = {Wide-area Surface Profile Measurement by Confocal Laser Microscope Using Tilted Focal Plane}, booktitle = {Proceedings of The 5th International Conference on Design Engineering and Science ICDES 2020}, year = 2020, }