@misc{CTT100892272,
  author = {Takanori Fukushima and Yoshiaki Shoji and Takashi Kajitani and Hibiki Ogiwara},
  title = {パターン形成方法、及びプラズマ処理方法},
  howpublished = {PublishedPatent},
  year = 2023,
  month  = {},
  note   = {PCT/JP2022/025607(2022/06/27), WO 2023/282114(2023/01/12)}
}