@inproceedings{CTT100809065, author = {Jun Enomoto and Yuki Hirata and Hiroki Akasaka and NAOTO OHTAKE}, title = {オニオンライクDLCコーティングの開発}, booktitle = {第33回ダイヤモンドシンポジウム講演要旨集}, year = 2019, }