@inproceedings{CTT100882114, author = {Yuma Wada and Kurniawan Winarto and Kubouchi Masatoshi and 田窪 毅 and Tetsuya Yamamoto and MASATOSHI KUBOUCHI}, title = {プラズマエッチング装置に用いられるシール用FKM のラジカル劣化における応力の影響}, booktitle = {第53回化学工学会秋季大会 講演要旨集}, year = 2022, } @inproceedings{CTT100869528, author = {Naofumi Iezumi and MASATOSHI KUBOUCHI and Winarto Kurniawan and Tsuyoshi Takubo and Yuma Wada and Tetsuya Yamamoto}, title = {Effect of strain on radical thinning rate of fluororubber for sealing products (II) - Tensile strain dependence of thinning rate using rectangular specimens -}, booktitle = {Proc. of 2022 Annual Meeting of the Materials Science Society of Japan}, year = 2022, }