@article{CTT100702128, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers}, journal = {Microelectronics Engineering}, year = 2016, } @inproceedings{CTT100734201, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu}, title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices}, booktitle = {}, year = 2016, } @inproceedings{CTT100723356, author = {Minami Teranishi and Mark Chang and Chun Yi Chen and Daisuke Yamane and Kazuya Masu and Masato Sone and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi}, title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100700918, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating}, booktitle = {ISE - Topical Meeting}, year = 2016, } @inproceedings{CTT100700964, author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {電解金めっきで作製したTi/Au微小カンチレバーの構造安定性}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, }