@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100743817,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {Tso-Fu Mark Chang and Toshifumi Konishi and Teruaki Safu and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}