@article{CTT100756750, author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices}, journal = {Microelectronic Engineering}, year = 2018, }