@book{CTT100770100,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2019,
}