@inproceedings{CTT100781974, author = {Kenji Inoue and Farid Triawan and Kazuaki Inaba and KIKUO KISHIMOTO and Masashi Nishi and Michiyo Sekiya and Kunihiko Sekido and Akihito Saitoh}, title = {Identification of delamination behavior of multilayer thin films polymer by finite element simulation of nanoindentation test}, booktitle = {}, year = 2018, }