@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}