@inproceedings{CTT100775374,
  author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {Hirofumi Niijima and Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Hiroyuki Ito and Teruaki Safu and Toshifumi Konishi and Shiro Dosho and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {Hirofumi Niijima and Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}