@article{CTT100648578,
  author = {Shigeki SAITO and Fumiaki Soda and Radon Dhelika and KUNIO TAKAHASHI and wataru takarada and TAKESHI KIKUTANI},
  title = {Compliant electrostatic chuck based on hairy microstructure},
  journal = {Smart Materials and Structures},
  year = 2012,
}