@misc{CTT100695529,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  year = 2015,
}

@misc{CTT100695530,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  year = 2015,
}

@misc{CTT100695531,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  year = 2015,
}

@misc{CTT100704898,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  year = 2015,
}



@phdthesis{CTT100695529,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  school = {Tokyo Institute of Technology},
  year = 2015,
}

@phdthesis{CTT100695530,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  school = {Tokyo Institute of Technology},
  year = 2015,
}

@phdthesis{CTT100695531,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  school = {Tokyo Institute of Technology},
  year = 2015,
}

@phdthesis{CTT100704898,
  author = {Radon Dhelika},
  title = {Development of compliant electrostatic chuck with hairy micro-structure},
  school = {Tokyo Institute of Technology},
  year = 2015,
}