@book{CTT100622217, author = {YOSHIHIKO HIRAI and YUKI ONISHI}, title = {ナノインプリントの最新技術と装置・材料・応用}, publisher = {フロンティア出版}, year = 2008, } @article{CTT100622122, author = {H. Takagi and M.Takahashi and R.Maeda and Y.Onishi and Y.Iriye and T.Iwasaki and Y.Hirai}, title = {Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process}, journal = {Microelectronic Engineering}, year = 2008, } @article{CTT100622121, author = {Y. Hirai and Y. Onishi and T. Tanabe and M. Shibata and T. Iwasaki and Y. Iriye}, title = {Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography}, journal = {Microelectronic Engineering}, year = 2008, } @article{CTT100622119, author = {H. Takagi and M. Takahashi and R. Maeda and Y. Onishi and Y. Iriye and T. Iwasaki and Y. Hirai}, title = {Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process}, journal = {Journal of Vacuum Science and Technology B}, year = 2008, } @article{CTT100622120, author = {Y.Onishi and Y.Hirai and 高木秀樹 and M.Takahashi and T.Tanabe and R.Maeda and Y.Iriye}, title = {Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint}, journal = {Japanese Journal of Applied Physics}, year = 2008, } @inproceedings{CTT100622142, author = {H, Takagi and Y. Onishi and M. Takahashi and R. Maeda and Y. Iriye and T. Iwasaki and Y. Hirai}, title = {Experimental And Numerical Analysis On Recovery Of Polymer Deformation After Demolding In Hot-Embossing Process}, booktitle = {}, year = 2008, } @inproceedings{CTT100622143, author = {YUKI ONISHI and 高木秀樹 and 高橋正春 and 前田龍太郎 and 平井義彦}, title = {伝熱構造連成解析による熱ナノインプリントの 高スループット化の検討}, booktitle = {}, year = 2008, }