@article{CTT100425725,
  author = {Shuu'ichirou Yamamoto and Atsushi Kawaguchi and Shunri Oda},
  title = {Preparation of Thin Films of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>X</sub> with a Smooth Surface by Atomic Layer MOCVD},
  journal = {Material Science of Engineering B},
  year = 1996,
}