@book{CTT100846136,
  author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone},
  title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers},
  publisher = {IFSA PUBLISHING, S.L.},
  year = 2021,
}

@article{CTT100874042,
  author = {Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Yoshihiro Miyake and Kazuya Masu},
  title = {A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds},
  journal = {ECS Transactions},
  year = 2021,
}

@article{CTT100846484,
  author = {Hitomi Watanabe and Tso-Fu Mark Chang and Michael  Schneider and Ulrich  Schmid and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency},
  journal = {Electrochem},
  year = 2021,
}

@inproceedings{CTT100862629,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873385,
  author = {Akihiro Uchiyama and Kohei Shibata and Akira Onishi and Takasi Ichikawa and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {ワイドレンジAu錘1軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873384,
  author = {Akira Onishi and Akihiro Uchiyama and Kohei Shibata and Takasi Ichikawa and Sangyeop Lee and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100862621,
  author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100862643,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100862622,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100873383,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Sangyeop Lee and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito},
  title = {Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100861440,
  author = {藤田 一矢 and 鈴木 康介 and Chun-Yi Chen and Tso-Fu Mark Chang and 山根 大輔 and 伊藤 浩之 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {金単結晶微小カンチレバーの機械的特性とサンプル形状効果},
  booktitle = {第82回応用物理学会秋季学術講演会},
  year = 2021,
}

@inproceedings{CTT100860788,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100860787,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100860772,
  author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873379,
  author = {Akira Onishi and Akihiro Uchiyama and Kohei Shibata and Takasi Itikawa and Sangyeop Lee and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873378,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100842072,
  author = {Takasi Itikawa and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873362,
  author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A MEMS accelerometer with a single axis two proof masses for a wide detection range},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873376,
  author = {Takasi Ichikawa and Akihiro Uchiyama and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873377,
  author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100845540,
  author = {Masato Sone and Tso-Fu Mark Chang and Takashi Nagoshi and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu},
  title = {医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価},
  booktitle = {日本金属学会 2021年春季講演大会},
  year = 2021,
}

@misc{CTT100787104,
  author = {Kazuya Masu and Masato Sone and Tso-Fu Mark Chang and Chun Yi Chen and Daisuke Yamane},
  title = {微細素子およびその製造方法},
  howpublished = {RegisteredPatent},
  year = 2021,
  month  = {},
  note   = {特願2017-055730(2017/03/22), 特開2018-158394(2018/10/11), 特許第6818299号(2021/01/05)}
}


@misc{CTT100787100,
  author = {Kazuya Masu and Daisuke Yamane},
  title = {微細素子の製造方法},
  howpublished = {RegisteredPatent},
  year = 2021,
  month  = {},
  note   = {特願2017-055732(2017/03/22), 特開2018-159573(2018/10/11), 特許第6840339号(2021/02/19)}
}