@book{CTT100600180, author = {Kenji Kawashima and Toshinori Fujita}, title = {Precise Position Stages Using Pneumatically Driven Bellows Actuator and Cylinder Equipped with Air Bearings}, publisher = {Springer}, year = 2010, } @article{CTT100605377, author = {Kenji Kawashima and Takeshi Arai and Kotaro Tadano and Toshinori Fujita and Toshiharu Kagawa}, title = {Development of Coarse/Fine Dual Stages using Pneumatically Driven Bellows Actuator and Cylinder wiht Air Bearings}, journal = {Precision Engineering}, year = 2010, } @inproceedings{CTT100616040, author = {Toshiyuki Yamamoto and Toshinori Fujita and Kenji Kawashima and Toshiharu Kagawa and Kazutoshi Sakaki}, title = {低流体ノイズ弁による空気圧微動ステージの超精密位置決め制御}, booktitle = {平成22年秋季フルードパワーシステム講演会講演論文集}, year = 2010, } @inproceedings{CTT100615606, author = {Jun Li and Joonmyeong Choi and Kenji Kawashima and Toshinori Fujita and Toshiharu Kagawa}, title = {Integrated control design of pneumatic servo table considering the dynamics of pipelines}, booktitle = {計測自動制御学会産業応用部門大会講演論文集}, year = 2010, } @inproceedings{CTT100612922, author = {Kotaro Tadano and Takeshi Arai and Kenji Kawashima and Toshinori Fujita and Toshiharu Kagawa}, title = {Precise Position Control of Coarse/Fine Dual Stage using Pneumatic Actuators}, booktitle = {World Automation Congress 2010}, year = 2010, }