@inproceedings{CTT100555858, author = {H. Akatsuka and Y. Ichikawa and T. Sakamoto and T. Shibata and A. Nezu}, title = {Population Kinetics and Number Densities of Excited Species in Low-Pressure Discharge Nitrogen Plasma}, booktitle = {Book of Abstracts, The 6th EU-Japan Joint Symposium on Plasma Processing}, year = 2008, }