@article{CTT100624081,
  author = {Toshifumi Yuji and Narong Mungkung and Yuichi Kiyota and Daishiro Uesugi and Minobu Kawano and Kenichi Nakabayashi and Hisaaki Kataoka and Yoshifumi Suzaki and Nobuki Kashihara and Hiroshi Akatsuka},
  title = {Surface Modification of Si Wafer by Low-Pressure  High-Frequency Plasma Chemical Vapor  Deposition Method},
  journal = {IEEE Trans. Plasma Sci.},
  year = 2011,
}

@inproceedings{CTT100634408,
  author = {T. Yuji and Y. Kiyota and Y. Okamura and H. Kinoshita and N. Mungkung and Y. Suzaki and T. Hamada and H. Akatsuka},
  title = {Cleaning Process for Semiconductor Equipment Process on Atmospheric-Pressure Non-Equilibrium DC Pulse Plasma Jet},
  booktitle = {Proc. the Japan – Thailand – Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011},
  year = 2011,
}

@inproceedings{CTT100634409,
  author = {T. Yuji and N. Mungkung and A. Kobayashi and Y. Suzaki and H. Akatsuka},
  title = {Diagnostics of Vibration and Rotational Temperatures in Atmospheric-Pressure Non-Equilibrium Discharge Electrodeless-Type Microwave Plasma Jet},
  booktitle = {Proc. the Japan – Thailand – Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011},
  year = 2011,
}

@inproceedings{CTT100626412,
  author = {Toshifumi Yuji and HIROSHI AKATSUKA and Yoshifumi Suzaki and Hiroshi Shibata and Shinichi Tashiro and Manabu Tanaka},
  title = {Radical Simulation in Atmospheric-pressure Non-equilibrium DC Pulse Plasma of Euler's Method},
  booktitle = {The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan},
  year = 2011,
}

@inproceedings{CTT100619453,
  author = {Toshifumi Yuji and 清田佑一 and 川野美延 and 中林健一 and 田代真一 and 田中学 and HIROSHI AKATSUKA},
  title = {Optical Emission Spectroscopy Measurement of High-frequency Low-pressure at Plasma-enhanced Chemical Vapor Deposition},
  booktitle = {The 2011 Annual Meeting Record, I.E.E. Japan},
  year = 2011,
}