@book{CTT100748622,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2017,
}

@article{CTT100757335,
  author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-Yi Chen and Akira Umise and Takashi Nagoshi and Masaki Tahara and Tomonari Inamura and Hideki Hosoda and Volodymyr A. Chernenko and Masato Sone},
  title = {Micro-Compression Study of Ni-Fe(Co)-Ga Magnetic Shape Memory Alloy for MEMS Sensors},
  journal = {Proceedings of IEEE Sensors 2017},
  year = 2017,
}

@article{CTT100751740,
  author = {Wan-ting Chiu and Chun-Yi Chen and Tso-Fu Mark Chang and Yuma Tahara and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Fabrication and Photocatalytic Performance of Au/ZnO Layered Structure on Silk Textile for Flexible Device Applications},
  journal = {Electrochimica Acta},
  year = 2017,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100751408,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2017,
}

@article{CTT100747804,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Fundamental Property Assessments of Biocompatible Silk-Pt Composite Prepared by Supercritical Carbon Dioxide Promoted Electroless Plating},
  journal = {Industrial & Engineering Chemistry Research},
  year = 2017,
}

@article{CTT100742124,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2017,
}

@article{CTT100741480,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {A Supercritical CO2 Promoted Electroless Ni-P Plating on Silk and Their Fundamental Characteristics Investigations},
  journal = {Journal of The Electrochemical Society},
  year = 2017,
}

@article{CTT100742125,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures},
  journal = {Materials Letters},
  year = 2017,
}

@article{CTT100734738,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold},
  journal = {Microelectronics Engineering},
  year = 2017,
}

@article{CTT100737295,
  author = {Tso-Fu Mark Chang and Wei-Hao Lin and Chun-Yi Chen and Yung-Jung Hsu and Masato Sone},
  title = {The Hydrobaric Effect on Cathodically Deposited Titanium Dioxide Photocatalyst},
  journal = {MRS Communications},
  year = 2017,
}

@article{CTT100736023,
  author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2017,
}

@article{CTT100735078,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Silk-Pt Composite Integration by Supercritical Carbon Dioxide Assisted Electroless Plating for Medical Devices Application},
  journal = {Microelectronics Engineering},
  year = 2017,
}

@inproceedings{CTT100751439,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751442,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751723,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751722,
  author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-Yi Chen and Akira Umise and Takashi Nagoshi and Masaki Tahara and Tomonari Inamura and Hideki HOSODA and Volodymyr A. Chernenko and Masato Sone},
  title = {Mechanical Property Evaluation in Superelastic Ni-Fe(Co)-Ga Micro-Pillar},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751721,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strategies of Mechanical Strengthening in Electroplated  Au Materials},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751720,
  author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751719,
  author = {Chun-Yi Chen and Yi-Hsuan Chiu and Tso-Fu Mark Chang and Yung-Jung Hsu and Mitsuo Niinomi and NOBUHIRO MATSUSHITA and Masato Sone},
  title = {Anodic Ti-Nb-Ta-Zr-O Nanotubes Array and Its Application for Photoelectrochemical Water Splitting},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751718,
  author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100757575,
  author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-yi Chen and Masaki Tahara and Tomonari Inamura and Hideki Hosoda and Volodymyr A. Chernenko and Masato Sone},
  title = {Mechanical Property of NiFeCoGa Shape Memory Alloy Evaluated by Micro-Compression Test},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751440,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751726,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751725,
  author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751724,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751436,
  author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-Yi Chen and Akira Umise and Takashi Nagoshi and Masaki Tahara and Tomonari Inamura and Hideki Hosoda and Volodymyr A. Chernenko and Masato Sone},
  title = {Mechanical Property Evaluation of NiFeCoGa Magnetic Shape Memory Alloys by Micro-Compression Tests for MEMS Sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754659,
  author = {Wan-Ting Chiu and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Hiromichi Kurosu and Masato Sone},
  title = {Realization of flexible and photocatalytic ZnO/Au/silk composite materials as components in wearable devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754658,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751717,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100826578,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Highly Reliable Platinum Coating on Silk via an Efficient Supercritical CO2 Promoted Electroless Plating for Biocompatible Wearable Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751716,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Property Enhancement of Platinum Metallization on Silk by Supercritical Carbon Dioxide Promoted Electroless Plating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745655,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745653,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745656,
  author = {Yi-Hsuan Chiu and Chun-Yi Chen and Mitsuo Niinomi and Tso-Fu Mark Chang and Yung-Jung Hsu and Nobuhiro Matsushita and Masato Sone},
  title = {One-Step Anodization Synthesis of Ti-Nb-Ta-Zr-O Nanotubes Arrays for Photoelectrochemical Water Oxidation},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742158,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742156,
  author = {Yi-Hsuan Chiu and Chun-Yi Chen and Mitsuo Niinomi and Tso-Fu Mark Chang and Yung-Jung Hsu and Nobuhiro Matsushita and Masato Sone},
  title = {Ti-Nb-Ta-Zr-O Nanotubes Arrays and Their Applications for PEC Water Splitting},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100743817,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735592,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  booktitle = {IEEE-NEMS 2017},
  year = 2017,
}

@inproceedings{CTT100735375,
  author = {Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735374,
  author = {Tso-Fu Mark Chang and Yi-Hsuan Chiu and Chun-Yi Chen and Yung-Jung Hsu and Masato Sone},
  title = {Effect of Applied Pressure on Photocatalytic Activity of Titanium Dioxide Synthesized by Cathodic Deposition with Supercritical Carbon Dioxide},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {Takuma Suzuki and Tso-Fu Mark Chang and Chun Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735886,
  author = {Kengo Igawa and Sari Yanagida and Tso-Fu Mark Chang and Chun Yi Chen and 田原正樹 and Tomonari Inamura and Hideki HOSODA and Chernenko Volodymyr A. and Masato Sone},
  title = {微小圧縮試験片を用いたNiFeCoGa形状記憶合金の機械的特性評価},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735875,
  author = {Masato Sone and Tso-Fu Mark Chang and Chun-yi Chen and unknown unknown},
  title = {超臨界二酸化炭素エマルションを用いた半導体銅配線プロセスの研究 (招待講演)},
  booktitle = {電気化学会第84回大会},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {Katsuyuki Machida and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Tso-Fu Mark Chang and Kazuya Masu and Masato Sone},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {Tso-Fu Mark Chang and Toshifumi Konishi and Teruaki Safu and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {Takuma Suzuki and Tso-Fu Mark Chang and Chun Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@misc{CTT100753772,
  author = {Wan-ting Chiu and Mitsuo Sano and Cheng-Chuan Wang and Tso-Fu Mark Chang and Chun-Yi Chen and Hiromichi Kurosu and Masato Sone},
  title = {Fabrication of composite materials for wearable devices by electroless plating with supercritical carbon dioxide},
  year = 2017,
}

@misc{CTT100787104,
  author = {Kazuya Masu and Masato Sone and Tso-Fu Mark Chang and Chun Yi Chen and Daisuke Yamane},
  title = {微細素子およびその製造方法},
  howpublished = {RegisteredPatent},
  year = 2021,
  month  = {},
  note   = {特願2017-055730(2017/03/22), 特開2018-158394(2018/10/11), 特許第6818299号(2021/01/05)}
}