@article{CTT100674611,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and Its Applications},
  journal = {ECS Transactions},
  year = 2014,
}

@article{CTT100669022,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100666863,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Design of sub-1g microelectromechanical systems accelerometers},
  journal = {Applied Physics Letters},
  year = 2014,
}

@article{CTT100666864,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@inproceedings{CTT100678032,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1mG-to-20G Integrated MEMS Inertial Sensor},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684016,
  author = {Daisuke Yamane and Katsuyuki Machida and Kazuya Masu},
  title = {MEMS for sensing sub-1G},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678033,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677571,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Shota Kamei and Kazuya Masu and Katsuyuki Machida},
  title = {高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684013,
  author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {マイクロビーズを用いたPDMS製マイクロ流路チップへのレジオネラ菌捕獲の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677570,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677573,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677572,
  author = {Takaaki Matsushima and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676377,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル構造による３軸加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676378,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {エネルギーハーべスティングデバイスの検討（４）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684012,
  author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -蛍光強度の時間依存性 蛍光強度の時間依存性-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676374,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676375,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676376,
  author = {Shota Kamei and Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674567,
  author = {Daisuke Yamane and Shota Kamei and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674568,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Shota Kamei and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタルによる静電容量型3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674569,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684011,
  author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {マイクロビーズとPDMS製マイクロ流路を用いたレジオネラ菌捕獲チップの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684704,
  author = {Yusuke Shiino and Hiroyuki Ito and Taku Fujiwara and Noboru Ishihara and Hisashi Yamanouchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100748044,
  author = {R. Hayashi and Y. Nishimura and H. Nakazawa and M. Ishida and K. Sawada and H. Ishii and K. Machida and N. Ishihara and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {PDMA-Based Microfluidic Chip for Detection of Legionella pneumophila by Mixing with Microbeads},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674565,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673061,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673062,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673063,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and its Application},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100669023,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668513,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {MEMS加速度センサによるSub-1G検出の基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668512,
  author = {Ken Kagaya and Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {エネルギーハーベスティングデバイスの検討（２）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668511,
  author = {Toshifumi Konishi and Ken Kagaya and Daisuke Yamane and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {エネルギーハーベスティングデバイスの検討（３）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668510,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668508,
  author = {Hiroyuki Ito and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {RF受信機のためのアレイ型MEMS共振器ミキサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668509,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}