@misc{CTT100753371, author = {TakaoShimizu and HIROSHI FUNAKUBO and Kiriha Katayama and Takanori Mimura}, title = {強誘電性薄膜、電子素子及び製造方法}, howpublished = {RegisteredPatent}, year = 2020, month = {}, note = {特願2016-545654(2015/08/28), 再表2016/031986(2017/06/15), 特許第6661197号(2020/02/14)} }