@article{CTT100761383, author = {Zebing Mao and Kazuhiro Yoshida and Joon-wan Kim}, title = {Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel}, journal = {Microsystem Technologies}, year = 2017, } @inproceedings{CTT100755035, author = {ZEBING MAO and KAZUHIRO YOSHIDA and Joon-wan KIM}, title = {Fabrication and Bonding of SU-8 Free-standing Microstructures}, booktitle = {山梨講演会2017 講演論文集(CD-ROM)}, year = 2017, } @inproceedings{CTT100753129, author = {ZEBING MAO and Joon-wan KIM and KAZUHIRO YOSHIDA}, title = {Study on Geometrical Parameters of Micro Check Valves made of SU-8}, booktitle = {日本機械学会2017年度年次大会講演論文集(DVD論文集)}, year = 2017, }