@inproceedings{CTT100842068,
  author = {Takasi Itikawa and Ken Atsumi and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842064,
  author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816076,
  author = {Ken Atsumi and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816077,
  author = {Takasi Itikawa and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討},
  booktitle = {},
  year = 2020,
}