@inproceedings{CTT100721711,
  author = {Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and masaaki matsushima and Hiroshi Uchida and YOSHISATO KIMURA and HIROSHI FUNAKUBO},
  title = {スパッタリング法によるCa-Mg-Si基膜の作製と特性評価},
  booktitle = {},
  year = 2015,
}