@misc{CTT100789757,
  author = {HIROSHI FUNAKUBO and Mao Kurokawa},
  title = {シリコン系薄膜及びその製造方法},
  howpublished = {RegisteredPatent},
  year = 2022,
  month  = {},
  note   = {特願2018-068515(2018/03/30), 特開2018-174325(2018/11/08), 特許第7076096号(2022/05/19)}
}