@inproceedings{CTT100810776,
  author = {Shigeki Nakagawa and Hisanori Hayashibara and Masanari Nakagome and Yoshimasa Ogawa and Yota Takamura},
  title = {In-situ internal stress observation of growing ferromagnetic thin films during sputter-deposition process},
  booktitle = {IEICE Tech. Rep.},
  year = 2019,
}