@inproceedings{CTT100598995,
  author = {Tarou Muraki and 李 伝波 and Katsunori Masubuchi and kouichi usami and Ken Uchida and SHUNRI ODA},
  title = {ラジカル窒化を用いたゲルマニウムナノワイヤデバイスの作製},
  booktitle = {},
  year = 2009,
}