@inproceedings{CTT100816746, author = {Kenntarou Matsuura and Junnichi Shimizu and Mayato Toyama and Takumi Ohashi and Takuro Sakamoto and Iriya Muneta and 石原聖也 and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 小椋厚志 and Hitoshi Wakabayashi}, title = {大面積集積化に向けたスパッタ二次元半導体 MoS2 薄膜のTop-gate nMISFETs チャネル応用}, booktitle = {}, year = 2019, }