@inproceedings{CTT100882193, author = {Koki Hihara and Moataz Eissa and Keita Yamaguchi and Hiromu Onodera and Yoshitaka Ohiso and Tomohiro Amemiya and AKITOSHI OKINO and Nobuhiko Nishiyama}, title = {Investigation of Semiconductor Hydrophilicity by Atomosphere Pressure Plasma toward Heterogeneous Material-integrated Photonic Circuits}, booktitle = {}, year = 2022, } @inproceedings{CTT100861050, author = {Hiromu Onodera and Takehiko Kikuchi and Yoshitaka Oiso and Tomohiro Amemiya and Nobuhiko Nishiyama}, title = {Bonding Position Accuracy of Direct Transfer Bonding, Chip-on-wafer Bonding for III-V/Si Heterogeneous Integration}, booktitle = {}, year = 2021, } @inproceedings{CTT100861048, author = {Hiromu Onodera and Takehiko Kikuchi and Yoshitaka Oiso and Tomohiro Amemiya and Nobuhiko Nishiyama}, title = {Bonding Position Accuracy of Direct Transfer Bonding, Chip-on-wafer Bonding for III-V/Si Heterogeneous Integration}, booktitle = {}, year = 2021, }