@article{CTT100748054,
  author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip},
  journal = {ECS Trans.},
  year = 2015,
}

@article{CTT100692402,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}

@article{CTT100690964,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  journal = {ECS Transactions},
  year = 2015,
}

@article{CTT100685143,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Shota Kamei and Kazuya Masu and Katsuyuki Machida},
  title = {An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2015,
}

@article{CTT100686951,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass},
  journal = {Microsystem Technologies},
  year = 2015,
}

@inproceedings{CTT100748046,
  author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {Stress Responses of Bacteria, Legionella, Confined in MEMS Microfluidic Chip},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100697691,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Properties of Electrodeposited Gold Thin Films},
  booktitle = {TACT 2015 International Thin Films Conference},
  year = 2015,
}

@inproceedings{CTT100695299,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695308,
  author = {Teruaki Safu and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695306,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida and Katsuyuki Machida},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695305,
  author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {移動体制御における慣性センサ適用性の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695304,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {Sub-1G?20G集積化MEMS慣性センサ},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100748045,
  author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100698704,
  author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {Stress responses of bacteria confined in microfluidic chips},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692512,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100691819,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {AMC2015},
  year = 2015,
}

@inproceedings{CTT100692510,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Mechanical Properties of Electrodeposited Gold for Application in MEMS},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100693804,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers},
  booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering},
  year = 2015,
}

@inproceedings{CTT100694933,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test},
  booktitle = {MNE2015},
  year = 2015,
}

@inproceedings{CTT100694936,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating},
  booktitle = {MNE2015},
  year = 2015,
}

@inproceedings{CTT100695300,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695301,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695302,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695309,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {Sub-1G?20G集積化MEMS加速度センサの基本評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695310,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida and Katsuyuki Machida},
  title = {ゲイン制御型CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {Teruaki Safu and Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695406,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology},
  booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials},
  year = 2015,
}

@inproceedings{CTT100697111,
  author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -紫外光照射によるレジオネラの光応答の観測-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695303,
  author = {Daisuke Yamane and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Inertial Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695295,
  author = {Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Nano-G metrology system and its biomedical applications by CMOS-MEMS technology},
  booktitle = {Biological Systems: Open Access},
  year = 2015,
}

@inproceedings{CTT100692702,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Compression deformation of micro-components fabricated by FIB from gold electrodeposited films},
  booktitle = {ISAMR2015},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692273,
  author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Shota Kamei and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {慣性センサを用いた移動体制御の基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692321,
  author = {Yusuke Nishimura and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {マイクロ流路内でのレジオネラ属菌のストレス応答},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695297,
  author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {MEMS慣性センサを用いた移動体制御の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {Minami Teranishi and Mark Chang and Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100682962,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Masaki Yano and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Tatsuo Sato and Masato Sone},
  title = {Stability of Movable Structure Formed by Au Electroplating for MEMS Devices},
  booktitle = {ICMAT2015 & IUMRS-ICA2015,},
  year = 2015,
}

@inproceedings{CTT100690965,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686947,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684706,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683810,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {エネルギーハーべスティングデバイスの検討（5）},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683809,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684014,
  author = {Yusuke Nishimura and Ryuhei Hayashi and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -各種細菌の蛍光強度特性の時間依存性-},
  booktitle = {},
  year = 2015,
}