@article{CTT100700427, author = {Haochun Tang and Kyohei Ishikawa and Keisuke Ide and Hidenori Hiramatsu and Shigenori Ueda and Naoki Ohashi and Hideya Kumomi and Hideo Hosono and Toshio Kamiya}, title = {Effects of residual hydrogen in sputtering atmosphere on structures and properties of amorphous In-Ga-Zn-O thin films}, journal = {J. Appl. Phys.}, year = 2015, }