@book{CTT100791875, author = {Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida}, title = {Electrodeposition of Gold Alloys and the Mechanical Properties}, publisher = {IntechOpen}, year = 2019, } @book{CTT100791876, author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida}, title = {Pulse-Current Electrodeposition of Gold}, publisher = {IntechOpen}, year = 2019, } @book{CTT100770100, author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors}, publisher = {IFSA Publishing}, year = 2019, } @article{CTT100807192, author = {Tatsuya Koga and Takashi Ichikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100803948, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, journal = {Metals}, year = 2019, } @article{CTT100807019, author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu}, title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology}, journal = {ECS Transactions}, year = 2019, } @article{CTT100793648, author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100795920, author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100796028, author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100786193, author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @inproceedings{CTT100806470, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film}, booktitle = {}, year = 2019, } @inproceedings{CTT100806469, author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method}, booktitle = {}, year = 2019, } @inproceedings{CTT100809254, author = {Takasi Itikawa and Shouta Otobe and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {3Dピラー型Au錘MEMS加速度センサ}, booktitle = {}, year = 2019, } @inproceedings{CTT100809253, author = {Takasi Itikawa and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価}, booktitle = {}, year = 2019, } @inproceedings{CTT100811731, author = {Hiroyuki Ito and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Noboru Ishihara and Yoshihiro Miyake and Katsuyuki Machida and Kazuya Masu}, title = {兆し計測のための高感度MEMS加速度センサ技術}, booktitle = {}, year = 2019, } @inproceedings{CTT100806472, author = {Tomoki Iriya and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electroplating of Au-Pd Alloy Films and the Mechanical Properties}, booktitle = {}, year = 2019, } @inproceedings{CTT100809252, author = {Sayaka Koga and Takasi Itikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100804032, author = {Tso-Fu Mark Chang and Yu-An Chien and Hao-Chun Tang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles}, booktitle = {}, year = 2019, } @inproceedings{CTT100807194, author = {Takasi Itikawa and Shouta Otobe and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Masato Sone and Kazuya Masu}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)}, booktitle = {}, year = 2019, } @inproceedings{CTT100802558, author = {Masato Sone and Hao-Chun Tang and Tso-Fu Mark Chang and Chun Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu}, title = {超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価}, booktitle = {電気鍍金研究会}, year = 2019, } @inproceedings{CTT100794652, author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test}, booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics}, year = 2019, } @inproceedings{CTT100791879, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test}, booktitle = {}, year = 2019, } @inproceedings{CTT100791878, author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence}, booktitle = {}, year = 2019, } @inproceedings{CTT100790677, author = {Shouta Otobe and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790679, author = {Kyotaro Nitta and Tang Haochun and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {電気めっき法によるAu-Cu合金微小カンチレバーの作製}, booktitle = {}, year = 2019, } @inproceedings{CTT100790674, author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790673, author = {Ken Atsumi and Shouta Otobe and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {積層メタル技術によるピラー型容量検出電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790675, author = {Hitomi Watanabe and Takuma Suzuki and Chun Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響}, booktitle = {}, year = 2019, } @inproceedings{CTT100790678, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果}, booktitle = {}, year = 2019, } @inproceedings{CTT100782446, author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS}, booktitle = {}, year = 2019, } @misc{CTT100820740, author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito}, title = {微細素子}, howpublished = {RegisteredPatent}, year = 2022, month = {}, note = {特願2018-102096(2018/05/29), 特開2019-207133(2019/12/05), 特許第7002732号(2022/01/05)} }