@book{CTT100835470, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, publisher = {MDPI}, year = 2020, } @article{CTT100834843, author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties}, journal = {Electrochem}, year = 2020, } @article{CTT100823024, author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Ryo Shigeyama and Taiki Ogata and Yoshihiro Miyake}, title = {CMOS-MEMS Based Microgravity Sensor and Its Application}, journal = {ECS Transactions}, year = 2020, } @article{CTT100820976, author = {Kyotaro Nitta and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers}, journal = {Journal of The Electrochemical Society}, year = 2020, } @article{CTT100806473, author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability}, journal = {IEEE Conference Paper}, year = 2020, } @inproceedings{CTT100842066, author = {Akihiro Uchiyama and Takasi Itikawa and Sayaka Koga and Katsuyuki Machida and Kazuya Masu and Noboru Ishihara and Shinichi Iida and Hiroyuki Ito}, title = {Au錘一軸MEMS加速度センサの差動容量型電極構造の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842067, author = {Takasi Itikawa and Akihiro Uchiyama and Sayaka Koga and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Shinichi Iida and Hiroyuki Ito}, title = {100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842065, author = {Kohei Shibata and Takasi Itikawa and Sayaka Koga and Katsuyuki Machida and Kazuya Masu and Noboru Ishihara and Shinichi Iida and Hiroyuki Ito}, title = {高分解能単一Au 錘CMOS-MEMS 加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842063, author = {Takashi Ichikawa and Kohei Shibata and Tatsuya Koga and Katsuyuki Machida and Shinichi Iida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito}, title = {A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer}, booktitle = {}, year = 2020, } @inproceedings{CTT100842069, author = {Akihiro Uchiyama and Takasi Itikawa and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ}, booktitle = {}, year = 2020, } @inproceedings{CTT100842068, author = {Takasi Itikawa and Ken Atsumi and Sayaka Koga and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito}, title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842071, author = {本田優斗 and 田中佐和子 and 崔容俊 and Toshihiko Noda and Kazuhiro Takahashi and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Hiroyuki Ito and 二階堂靖彦 and Mitsumasa Saito and Shinichi Yoshida}, title = {フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100842064, author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes}, booktitle = {}, year = 2020, } @inproceedings{CTT100816075, author = {Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing}, booktitle = {}, year = 2020, } @inproceedings{CTT100816077, author = {Takasi Itikawa and Ken Atsumi and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100816076, author = {Ken Atsumi and Sayaka Koga and Takasi Itikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討}, booktitle = {}, year = 2020, } @misc{CTT100835046, author = {Masato Sone and Tso-Fu Mark Chang and Chun Yi Chen and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu}, title = {貴金属またはその合金の微細結晶組織を有する金属材料}, howpublished = {PublishedPatent}, year = 2020, month = {}, note = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)} }