@article{CTT100843201,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing},
  journal = {Journal of Vacuum Science & Technology B},
  year = 2021,
}

@inproceedings{CTT100853319,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100852340,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Shape Deformation Analysis of UV Imprint Considering UV Curing/Shrinkage and Thermal Deformation Based on Reaction Kinetics},
  booktitle = {},
  year = 2021,
}

@misc{CTT100846524,
  author = {KENJI AMAYA},
  title = {状態量推定方法、状態量推定装置、及びプログラム},
  howpublished = {RegisteredPatent},
  year = 2023,
  month  = {},
  note   = {特願2019-161468(2019/09/04), 特開2021-039036(2021/03/11), 特許第7255804号(2023/04/03)}
}