@article{CTT100864855, author = {Takanori Mimura and Takao Shimizu and Yoshio Katsuya and Osami Sakata and Hiroshi Funakubo}, title = {Thickness dependence of phase stability in epitaxial (HfxZr1-x)O2 films}, journal = {Physical review materials}, year = 2021, } @inproceedings{CTT100874660, author = {Ryoichi Mizutani and Shinnosuke Yasuoka and Takao Shimizu and Hiroshi Funakubo}, title = {Temperature dependence of ferroelectricity in (Al1-xScx)N thin films}, booktitle = {}, year = 2021, } @misc{CTT100846538, author = {HIROSHI FUNAKUBO and TakaoShimizu and Kodai Aoyama}, title = {バリウムおよびストロンチウムを含む珪化物薄膜及びその製造方法}, howpublished = {PublishedPatent}, year = 2021, month = {}, note = {特願2019-160314(2019/09/03), 特開2021-038433(2021/03/11)} } @misc{CTT100865142, author = {HIROSHI FUNAKUBO and TakaoShimizu and Miyu Hasegawa and Keisuke Ishihama}, title = {誘電性薄膜、誘電性薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置}, howpublished = {PublishedPatent}, year = 2021, month = {}, note = {特願2020-546060(2019/09/11), 再表2020/054779(2021/09/30)} } @misc{CTT100846542, author = {HIROSHI FUNAKUBO and Akinori Tateyama and TakaoShimizu and yuichiro orino and Minoru Kuribayashi Kurosawa and Takahisa Shiraishi}, title = {圧電体膜の製造方法}, howpublished = {PublishedPatent}, year = 2021, month = {Mar.}, note = {特願2019-564746(2019/01/10), 再表2019/139100(2021/03/11)} }