@article{CTT100902767,
  author = {Takumi Akiyama and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  },
  journal = {Micro and Nano Engineering},
  year = 2023,
}

@article{CTT100888636,
  author = {Kosuke Suzuki and Yiming Jiang and Ryohei Hori and Ken Hashigata and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold},
  journal = {Materials Today Communications},
  year = 2023,
}

@article{CTT100887972,
  author = {Akira Onishi and Kisuke Miyado and Devi Srujana Tenneti and Katsuyuki Machida and Parthojit Chakraborty and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology},
  journal = {2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)},
  year = 2023,
}

@inproceedings{CTT100903112,
  author = {Ryohei Hori and Kazuya Fujita and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength},
  booktitle = {Taiwan Association for Coating and Thin Film Technology (TACT2023)},
  year = 2023,
}

@inproceedings{CTT100892415,
  author = {Masato Sone and Tso-Fu Mark Chang and Tomoyuki Kurioka and Chun-yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake},
  title = {Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers},
  booktitle = {244th ECS Meeting},
  year = 2023,
}

@inproceedings{CTT100906278,
  author = {Kisuke Miyado* and Akira Onishi and Tenneti Devi Srujana and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Development of Proof-mass Position Control Electrodes for Au Proof-mass Single-Axis Differential CMOS-MEMS Accelerometer},
  booktitle = {第15回集積化MEMSシンポジウム論文集},
  year = 2023,
}

@inproceedings{CTT100895776,
  author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100895772,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki  Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100895779,
  author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang},
  title = {Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100903468,
  author = {御宿 希祐Kisuke Miyado and Devi.Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer},
  booktitle = {Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02},
  year = 2023,
}

@inproceedings{CTT100903469,
  author = {Kisuke Miyado and Akira Onishi and Devi.Srujana Tenneti and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology},
  booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集},
  year = 2023,
}

@inproceedings{CTT100903103,
  author = {Kisuke Miyado and Devi.Srujana Tenneti and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Dependence of proof mass displacement on applied voltage for single differential CMOS-MEMS capacitive accelerometer},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100903096,
  author = {Kisuke Miyado and Akira Onishi and Devi.Srujana Tenneti and Katsuyuki Machida and Parthojit CHAKRABORTY and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Design of serpentine spring for MEMS devices by gold multi-layer metal technology},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885246,
  author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {単結晶金微小カンチレバーの曲げ強度に対する断面積の影響},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885244,
  author = {Syunkai Watanabe and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Akira Onishi and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885240,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885243,
  author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun Yi Chen and Parthojit CHAKRABORTY and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang},
  title = {金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}