@article{CTT100907695, author = {Hiroyoshi Tanabe and Akira Jinguji and Atsushi Takahashi}, title = {Accelerating extreme ultraviolet lithography simulation with weakly guiding approximation and source position dependent transmission cross coefficient formula}, journal = {Journal of Micro/Nanopatterning, Materials, and Metrology}, year = 2024, } @inproceedings{CTT100911340, author = {Hiroyoshi Tanabe and Akira Jinguji and Atsushi Takahashi}, title = {Pre-training CNN for fast EUV lithography simulation including M3D effects}, booktitle = {Proc. SPIE 12954, DTCO and Computational Patterning III, 129540I}, year = 2024, } @inproceedings{CTT100910073, author = {Kazuya Taniguchi and Satoshi Tayu and Atsushi Takahashi and Mathieu Molongo and Makoto Minami and Katsuya Nishioka}, title = {A Fast Three-layer Bottleneck Channel Track Assignment with Layout Constraints using ILP}, booktitle = {Proc. the 25th Workshop on Synthesis And System Integration of Mixed Information technologies (SASIMI 2024)}, year = 2024, } @inproceedings{CTT100910075, author = {Zuan Jiyo and Satoshi Tayu and Atsushi Takahashi and Mathieu Molongo and Makoto Minami and Katsuya Nishioka}, title = {A Template Routing Method Using SMT Solver for Double Via-Constrained Pair Symmetric Routing Problem}, booktitle = {IEICE Technical Report (VLD2023-102)}, year = 2024, } @inproceedings{CTT100910076, author = {Kazuya Taniguchi and Satoshi Tayu and Atsushi TAKAHASHI and モロンゴ マチュー and Makoto Minami and 西岡克也}, title = {Three-layer Bottleneck Channel Track Assignment for Pins Placed on Opposite Sides}, booktitle = {IEICE Technical Report (VLD2023-103)}, year = 2024, } @inproceedings{CTT100910079, author = {Zezhong Wang and Masayuki Shimoda and Atsushi Takahashi}, title = {Single Trunk Routing Problem for Generalized Channel}, booktitle = {IEICE Technical Report (VLD2023-104)}, year = 2024, }