@article{CTT100777434,
  author = {Reiko Saito and * Haruko Akutsu and Jun Asakawa and Shiro Takeno and Kei Kiyokawa and Satoru Nagashima and Takeharu Ishikawa and Takahiro Kashiwagi and Akio Takano and Tetsuo Sakamoto and Masaaki Fujii},
  title = {Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry},
  journal = {Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},
  year = 2018,
}