@article{CTT100822713, author = {Reiko Saito and Haruko Akutsu and Jun Asakawa and Yue Zhao and Kei Kiyokawa and Masato Morita and Tetsuo Sakamoto and Masaaki Fujii}, title = {Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers}, journal = {J. Vac. Sci. Technol., B}, year = 2020, }